Thermal boat source for Thin Films
Thermal boat sources provide an efficient and uncomplicated process for thin film deposition. An electrical current passes through a resistive element containing the material. This leads to heating of the element, the evaporation of the material, and adhesion to the substrate.
Nikalyte offer sources with 1, 2 or 4 pockets. In each model the boats are separated with cross-contamination shielding and protected by individual shutters mounted on the main source flange. The source design ensures that every boat is equidistant from the central axis, providing optimum film uniformity. Sources can employ boats or filaments made from refractory metals such as molybdenum, tantalum, or tungsten.
The TBS can be supplied individually or integrated with any Nikalyte custom-built PVD system.
Key Features
- 1-4 pockets
- Heating up to 2250°C
- Bakeable up to 250°C
- Fully UHV Compatible