Thermal Boat Source : TBS

Nikalyte’s Thermal Boat Sources (TBS) provide a reliable and efficient method for thin film deposition. Utilizing an electrical current passing through a resistive element, the TBS heats the material to its evaporation point, allowing it to adhere to the substrate in a controlled manner. Available in 1, 2, or 4-pocket configurations, each source is designed with cross-contamination shielding and individual shutters mounted on the main source flange to ensure clean and precise deposition. The boats are positioned equidistant from the central axis for optimal film uniformity. The TBS is compatible with refractory metals such as molybdenum, tantalum, or tungsten, offering versatility for various applications. It can be supplied as a standalone unit or seamlessly integrated into any custom-built Nikalyte custom-built PVD system