Mini E-beam evaporator : EVAP-4
The Evap-4 is a compact, efficient 4-pocket mini e-beam evaporator with co-evaporation capability. It enables precise deposition of metals like Gold, Silver, and Chrome, with minimal heat load on the substrate compared to thermal evaporators and e-beam hearths, by direct heating the crucible with an electron beam.
The Mini E-Beam Evaporator is a cutting-edge tool designed for high-precision thin-film deposition. Ideal for research and production environments, this compact system uses an electron beam to directly heat the evaporant in a crucible, allowing for the deposition of metals with exceptional control. Compared to traditional electron beam hearths, the Mini E-Beam Evaporator offers superior efficiency, reduced heat load on the substrate, and the ability to co-evaporate multiple materials simultaneously, making it a versatile and reliable solution for various coating applications. The evaporator is ideally suited for lift-off processes and contact metallisation.
The Evaporator is available in three versions: Single Pocket Mini E-Beam (EVAP – 1), Compact Four Pocket Mini E-Beam (EVAP – 4C), and High Capacity Four Pocket Mini E-Beam (EVAP – 4).The Evap-4 is fully UHV compatible and can be supplied individually or integrated with any Nikalyte custom-built PVD system.
Key Features
- Co-evaporation of up to 4 materials
- Compact source design
- Low thermal load on substrates
- Combined 4-channel power supply
- Flux measurement for rate monitoring
- Fully UHV compatible
- Bakeable up to 250°C
- Manual or pneumatically controlled shutter
- Customizable in-vacuum length
Evap Specifications
| EVAP Options | EVAP – 1 | EVAP – 4C | EVAP – 4 |
| Mounting flange | NW40CF (2.75″ O.D.) | NW40CF (2.75″ O.D.) | NW63CF (4.5″ O.D.) |
| UHV compatible | Yes, bakeable up to 250°C | Yes, bakeable up to 250°C | Yes, bakeable up to 250°C |
| In vacuum length | 300mm – special length requirements can be discussed | ||
| In-vacuum diameter | 32mm | 34mm | 57mm |
| Co-evaporation | No | Yes | Yes |
| Number of pockets | 1 | 4 | 4 |
| Available crucibles | 210, 390, 1000mm3 | 210, 390mm3 | 210, 390, 1000mm3 |
| Crucible Materials | Mo, Ta, VC, W | Mo, Ta, VC, W | Mo, Ta, VC, W |
| Crucible Liners | PBN, Al2O3, BeO | PBN, Al2O3, BeO | PBN, Al2O3, BeO |
| Rod dimensions | Φ 4mm, 28mm long | Φ 2mm, 28mm long | Φ 4mm, 28mm long |
| Flux monitoring | Yes | Yes | Yes |
| Maximum power | 250W | 250W | 250W |